Title :
Amorphous silicon rich silicon nitride optical waveguides for high density integrated optics
Author :
Philipp, H.T. ; Andersen, K.N. ; Svendsen, W. ; Ou, H.
Author_Institution :
Group, Tech. Univ. of Denmark, Lyngby, Denmark
fDate :
4/1/2004 12:00:00 AM
Abstract :
Amorphous silicon rich silicon nitride optical waveguides clad in silica are presented as a high-index contrast platform for high-density integrated optics. Performance of different cross-sectional geometries have been measured and are presented with regards to bending loss and insertion loss. A sample double ring add-drop filter is presented.
Keywords :
integrated optics; optical filters; optical losses; optical waveguides; silicon compounds; SiN; amorphous silicon rich silicon nitride; bending loss; double ring add drop filter; high density integrated optics; high index contrast platform; insertion loss; optical waveguides;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20040308
