DocumentCode
949913
Title
Amorphous silicon rich silicon nitride optical waveguides for high density integrated optics
Author
Philipp, H.T. ; Andersen, K.N. ; Svendsen, W. ; Ou, H.
Author_Institution
Group, Tech. Univ. of Denmark, Lyngby, Denmark
Volume
40
Issue
7
fYear
2004
fDate
4/1/2004 12:00:00 AM
Firstpage
419
Lastpage
421
Abstract
Amorphous silicon rich silicon nitride optical waveguides clad in silica are presented as a high-index contrast platform for high-density integrated optics. Performance of different cross-sectional geometries have been measured and are presented with regards to bending loss and insertion loss. A sample double ring add-drop filter is presented.
Keywords
integrated optics; optical filters; optical losses; optical waveguides; silicon compounds; SiN; amorphous silicon rich silicon nitride; bending loss; double ring add drop filter; high density integrated optics; high index contrast platform; insertion loss; optical waveguides;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20040308
Filename
1283599
Link To Document