• DocumentCode
    949913
  • Title

    Amorphous silicon rich silicon nitride optical waveguides for high density integrated optics

  • Author

    Philipp, H.T. ; Andersen, K.N. ; Svendsen, W. ; Ou, H.

  • Author_Institution
    Group, Tech. Univ. of Denmark, Lyngby, Denmark
  • Volume
    40
  • Issue
    7
  • fYear
    2004
  • fDate
    4/1/2004 12:00:00 AM
  • Firstpage
    419
  • Lastpage
    421
  • Abstract
    Amorphous silicon rich silicon nitride optical waveguides clad in silica are presented as a high-index contrast platform for high-density integrated optics. Performance of different cross-sectional geometries have been measured and are presented with regards to bending loss and insertion loss. A sample double ring add-drop filter is presented.
  • Keywords
    integrated optics; optical filters; optical losses; optical waveguides; silicon compounds; SiN; amorphous silicon rich silicon nitride; bending loss; double ring add drop filter; high density integrated optics; high index contrast platform; insertion loss; optical waveguides;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20040308
  • Filename
    1283599