Title :
Resolution of spreading-resistance measurements on shallow layers
Author :
Abbasi, Shuja A. ; Brunnschweiler, A.
Author_Institution :
University of Southampton, Department of Electronics, Southampton, UK
Abstract :
The limited spatial resolution of spreading-resistance measurements made on shallow diffused layers is demonstrated both experimentally and theoretically. This effect seems to have been overlooked in the literature and may account for the discrepancies that are sometimes observed in profiles derived from spreading-resistance data obtained from bevelled surfaces.
Keywords :
doping profiles; electric resistance measurement; materials testing; bevelled surfaces; doping profile measurement; edge effects; semiconductor material testing; shallow diffused layers; spatial resolution; spreading resistance measurements;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19790207
