Title :
A simple approximation for calculating impurity profiles for a two-step diffusion process
Author :
Shrivastava, Ritu ; Marshak, Alan H.
Author_Institution :
Louisiana State University, Baton Rouge, LA
Abstract :
An accurate approximation for calculating two-step diffusion profiles is given. The result valid for the field-free case has the same form as the Gaussian profile resulting from the conventional delta function approximation. The result is simple enough to be useful for first-order analytic evaluation of device fabrication parameters.
Keywords :
Diffusion processes; Equations; Frequency; Function approximation; Hybrid integrated circuits; Impurities; Integrated circuit modeling; Temperature distribution; Voltage control; Voltage-controlled oscillators;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1977.10785
