Title :
S.A.W. resonators at 1.29 GHz with Q values approaching the material limit
Author :
Tanski, William J.
Author_Institution :
Sperry Research Center, Sudbury, USA
Abstract :
Two-port s.a.w. resonator filters have been fabricated at 1.29 GHz with Q values up to 7050. This experimental unloaded Q is about 87% of the material limit of 8100 at this frequency. Details of the device design are given and salient features of the fabrication process are outlined. The experimental results are discussed, demonstrating sufficient knowledge to permit fabrication of useful devices at supra-GHz frequencies.
Keywords :
acoustic microwave devices; microwave filters; quartz; resonators; surface acoustic wave devices; 1.29 GHz; Q-factor 7050; SAW resonator filters; device design; experimental results; fabrication; material limit Q-factor; microwave SAW resonators; two port resonator filters;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19790241
