Title :
Self-aligning MEMS in-line separable electrical connector
Author :
Larsson, Michael P. ; Syms, Richard R A
Author_Institution :
Opt. & Semicond. Devices Group, Imperial Coll. London, UK
fDate :
4/1/2004 12:00:00 AM
Abstract :
A MEMS in-line separable connector containing features for precision self-alignment is demonstrated. The concept relies on sliding connection between female and male halves to induce vertical deflections of a set of flexible conductors and establish stable electrical contacts. Electrodeposited photoresist is used to fabricate thick, nonplanar conductors, shaped by a silicon substrate that has previously been terraced by anisotropic etching. Further etched features ensure transverse and vertical self-alignment between conductor elements during mating. Prototype 10-way connectors are demonstrated with 200 μm wide conductors on a 250-μm pitch. Mechanical reliability of contacts during repeated mating and demating is demonstrated, and initial measurement of contact resistance reveals an encouraging value of 30 mΩ.
Keywords :
contact resistance; electric connectors; etching; micromechanical devices; photoresists; reliability; silicon; 200 microns; 250 microns; MEMS; Si; anisotropic etching; contact resistance; electrical connector; electrodeposited photoresist; flexible conductors; in-line separable connector; mechanical reliability; nonplanar conductors; precision self-alignment; prototype 10-way connectors; silicon; sliding connection; stable electrical contacts; vertical deflections; Anisotropic magnetoresistance; Conductors; Connectors; Contacts; Electrical resistance measurement; Etching; Micromechanical devices; Prototypes; Resists; Silicon;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2004.825238