Title :
Piezoelectric thin film unidirectional SAW transducer and filter
Author :
Sato, Hikaru ; Meguro, Tomomi ; Yamanouchi, Kazuhiko ; Shibayama, Kiyoshi
Abstract :
Small passband ripple piezoelectric thin film unidirectional transducers and filters are presented. ZnO thin film deposited on a fused silica was used in the experiment. As the result, the characteristics of no pass-band ripple and minimum insertion loss of 5.2 dB, and also the directionality of 22 to 29 dB per one transducer are obtained.
Keywords :
Acoustic transducers; Electrodes; Filters; Frequency; Piezoelectric films; Piezoelectric transducers; Sputtering; Substrates; Surface acoustic waves; Zinc oxide;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1978.10851
