DocumentCode
951970
Title
Characterization of micromachined silicon rectangular waveguide at 400 GHz
Author
Kirby, P.L. ; Pukala, D. ; Manohara, H. ; Mehdi, I. ; Papapolymerou, J.
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Volume
16
Issue
6
fYear
2006
fDate
6/1/2006 12:00:00 AM
Firstpage
366
Lastpage
368
Abstract
We present the first characterization of a micromachined silicon rectangular waveguide at 400GHz. The silicon waveguide has an average loss of 0.086dB/mm for a range of 350-460GHz. The waveguides are formed using well known microfabrication techniques and demonstrate a successful first step towards the use of silicon waveguides as a viable option for THz systems.
Keywords
micromachining; rectangular waveguides; submillimetre wave devices; 350 to 460 GHz; 400 GHz; laser micromachining; silicon waveguide; Dry etching; Frequency; Horn antennas; Micromachining; Rectangular waveguides; Shape control; Silicon; Waveguide components; Waveguide lasers; Wet etching; Laser micromachining; micromachining; silicon waveguide; submillimeter; terahertz (THz);
fLanguage
English
Journal_Title
Microwave and Wireless Components Letters, IEEE
Publisher
ieee
ISSN
1531-1309
Type
jour
DOI
10.1109/LMWC.2006.875593
Filename
1637497
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