Title :
Characterization of micromachined silicon rectangular waveguide at 400 GHz
Author :
Kirby, P.L. ; Pukala, D. ; Manohara, H. ; Mehdi, I. ; Papapolymerou, J.
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fDate :
6/1/2006 12:00:00 AM
Abstract :
We present the first characterization of a micromachined silicon rectangular waveguide at 400GHz. The silicon waveguide has an average loss of 0.086dB/mm for a range of 350-460GHz. The waveguides are formed using well known microfabrication techniques and demonstrate a successful first step towards the use of silicon waveguides as a viable option for THz systems.
Keywords :
micromachining; rectangular waveguides; submillimetre wave devices; 350 to 460 GHz; 400 GHz; laser micromachining; silicon waveguide; Dry etching; Frequency; Horn antennas; Micromachining; Rectangular waveguides; Shape control; Silicon; Waveguide components; Waveguide lasers; Wet etching; Laser micromachining; micromachining; silicon waveguide; submillimeter; terahertz (THz);
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2006.875593
