InP/Al2O3n-channel inversion-mode m.i.s.f.e.t.s using sulphur-diffused source and drain

InP metal-insulator-semiconductor field-effect transistors (m.i.s.f.e.t.s) have been fabricated using c.v.d. Al2O3 as the gate insulator and the sulphur-diffusion process for source and drain. The n-channel inversion-mode device exhibits normally off behaviour. A maximum d.c. transconductance gm of 10 mS (87 mS/mm of gate width) has been obtained.