A finite-element analysis of surface wave plasmas

Author

Igarashi, H. ; Watanabe, K. ; Ito, T. ; Fukuda, T. ; Honma, T.

Author_Institution

Graduate Sch. of Eng., Hokkaido Univ., Sapporo, Japan

Volume

40

Issue

2

fYear

2004

fDate

3/1/2004 12:00:00 AM

Firstpage

605

Lastpage

608

Abstract

This paper describes a finite-element analysis of surface microwaves coupled to a cold nonmagnetized plasma for chemical vapor deposition (CVD). The microwave-plasma coupling is taken into account by introducing the frequency-dependent permittivity. The computed resonant modes of the surface wave on the interface between the dielectric and plasma in a cylindrical vessel are shown to be in good agreement with the theoretical ones. Moreover, the computed field distribution for a waveguide loaded cylindrical vessel agrees well with that computed by the finite-difference time-domain (FDTD) method.

Keywords

finite difference time-domain analysis; finite element analysis; permittivity; plasma CVD; plasma waves; chemical vapor deposition; cold nonmagnetized plasma; field distribution; finite-difference time-domain; finite-element analysis; frequency-dependent permittivity; microwave-plasma coupling; resonant modes; surface microwaves; surface wave plasmas; waveguide loaded cylindrical vessel; Chemical analysis; Chemical vapor deposition; Distributed computing; Finite difference methods; Finite element methods; Frequency; Plasma chemistry; Plasma waves; Surface waves; Time domain analysis;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2004.825450

Filename

1284487