Study of the influence of leakage fields on the inchworm actuator

Author

Bernard, Y. ; Salon, S. ; Bouchilloux, P.

Author_Institution

Lab. de Genie Electrique de Paris, Centre Nat. de la Recherche Scientifique, Gif-sur-Yvette, France

Volume

40

Issue

2

fYear

2004

fDate

3/1/2004 12:00:00 AM

Firstpage

619

Lastpage

622

Abstract

In this paper, we study the design parameters and especially the influence of leakage electric fields on the performance of a piezoelectric inchworm actuator. We consider the total deformation of the actuator and the first piezoelectric element capacitance as a good indication of the leakage fields produced in the insulators. Particularly, we study the effect of the thickness of insulating disks that separate the piezoelectric elements and the effect of the state of central element electrodes when unexcited. The result of a coupled electromechanical modeling is that the leakage field does not have an important effect for this device geometry.

Keywords

electric fields; electromechanical effects; electrostatic actuators; modelling; piezoelectric actuators; actuator deformation; central element electrodes; coupled electromechanical modeling; electromechanical effects; insulating disk thickness; leakage electric fields; piezoelectric devices; piezoelectric element capacitance; piezoelectric inchworm actuator; Biomedical electrodes; Capacitance; Clamps; Contracts; Geometry; Insulation; Medical services; Piezoelectric actuators; Piezoelectric devices; Solid modeling;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2004.825323

Filename

1284490