Title :
Screened Multilayer Ceramics for Thick Film Hybrids
Author :
Ihochi, Takahiko
Author_Institution :
Hitachi Takasaki Works, Japan
fDate :
6/1/1974 12:00:00 AM
Abstract :
An approach to fabricating multilayer hybrids is described. The newly developed process, designated as the screened multilayer ceramic (SMC) hybrid, has been accomplished by improving green ceramic technology of an aluminarefractory metal system to a state of development similar to thick film screening technology and by developing a unique process that protects against oxidation of refractory metal at high temperature air firing.
Keywords :
Integrated circuit fabrication; Thick-film circuits; Ceramics; Costs; Nonhomogeneous media; Packaging; Sliding mode control; Substrates; Thermal conductivity; Thermal expansion; Thick films; Wiring;
Journal_Title :
Parts, Hybrids, and Packaging, IEEE Transactions on
DOI :
10.1109/TPHP.1974.1134847
