Silicon Integrated Circuits

The use of semiconductor integrated circuitry to reduce size and weight of military electronic systems is discussed. The pure semiconductor integrated circuit approach used to obtain micro-microminiaturization levels is reviewed and characterized. Described in this paper are the design and construction of a silicon integrated microcircuit. Results of examination of the electrical performance of the microcircuit are presented, including results of examination of the thermal behavior of the microcircuit. The silicon structure is analyzed in terms of internal and external geometry, material properties, and electrical performance.