Title :
Synthesis and analysis of d.l.t.s. spectra from m.o.s. surface states
Author_Institution :
Philips Research Laboratories, Redhill, UK
Abstract :
Given Nss and ¿ss as functions of energy and temperature, a procedure is developed to synthesise d.l.t.s spectra under arbitrary experimental conditions. Methods of analysis are then considered to determine Nss and ¿ss from capture experiments.
Keywords :
deep levels; metal-insulator-semiconductor structures; surface electron states; DLTS; MOS surface states; capture experiments; deep level transient spectroscopy;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19790532
