Title :
Surface-relief type Bragg grating reflector fabricated after overcladding removal
Author :
Ishii, M. ; Hibino, Y. ; Sugita, Atsushi ; Tamamura, T.
Author_Institution :
Opto-Electron. Lab., Ibaraki, Japan
Abstract :
A novel silica-based Bragg grating reflector on Si substrate is described. The reflector is formed on a core whose overcladding layer is removed by RIE until is is level with the core surface. The reflector which comprises a rectangular relief type grating only 1.6 mm long has the advantages of a highly controllable Bragg wavelength and a high reflectivity of 76% for the TE mode.
Keywords :
diffraction gratings; integrated optics; integrated optoelectronics; light reflection; mirrors; optical waveguides; 1.6 mm; Bragg grating reflector; GeO 2-SiO 2 core; RIE; Si substrate; SiO 2-Si; TE mode; overcladding removal; planar lightwave circuit; rectangular relief type grating;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19931120
