DocumentCode

953139

Title

The Application of a Flash Discharge Lamp to the Determination of Impurities in Thin Films

Author

Guldner, W.G.

Author_Institution

Bell Telephone Laboratories, Inc., Murray Hill, NJ

Volume

11

Issue

2

fYear

1964

fDate

6/1/1964 12:00:00 AM

Firstpage

9

Lastpage

13

Keywords

Chemical analysis; Gases; Impurities; Lamps; Nitrogen; Plugs; Resistors; Substrates; Thin film circuits; Transistors;

fLanguage

English

Journal_Title

Component Parts, IEEE Transactions on

Publisher

ieee

ISSN

0097-6601

Type

jour

DOI

10.1109/TCP.1964.1135006

Filename

1135006