Title :
Analysis of the performance of a MEMS micromirror
Author :
Wen, Jie ; Hoa, Xuyen D. ; Kirk, Andrew G. ; Lowther, David A.
Author_Institution :
Dept. of Electr. & Comput. Eng., McGill Univ., Montreal, Que., Canada
fDate :
3/1/2004 12:00:00 AM
Abstract :
This paper describes the structure and analysis of a particular micro-electromechanical-systems (MEMS) micromirror device that can be used as an optical switch. The predicted performance is compared with measurements. Sufficient details are given to enable this device to be used as a benchmark problem for electric field analysis and coupled structural-electric systems.
Keywords :
benchmark testing; electric fields; micromirrors; optical switches; MEMS micromirror; benchmark; benchmark problem; coupled structural-electric systems; design; electric field analysis; field modeling; micro-electromechanical-systems micromirror; optical switch; performance analysis; Communication switching; Dielectric substrates; Etching; Fabrication; Micromechanical devices; Micromirrors; Mirrors; Optical switches; Performance analysis; Silicon;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2004.824563
