• DocumentCode
    955537
  • Title

    Acoustic microscopy—1979

  • Author

    Kessler, Lawrence W. ; Yuhas, Donald E.

  • Author_Institution
    Sonoscan, Inc., Bensenville, IL
  • Volume
    67
  • Issue
    4
  • fYear
    1979
  • fDate
    4/1/1979 12:00:00 AM
  • Firstpage
    526
  • Lastpage
    536
  • Abstract
    Acoustic microscopy is emerging as an important analytical technique serving the needs of both biomedical and materials technology. Based upon imaging of specimens with elastic waves at VHF and UHF frequencies, acoustic microscopes reveal structural-mechanical properties with high magnification. A review of the techniques and their applications are presented.
  • Keywords
    Acoustic devices; Acoustic waves; Biomedical acoustics; Electron microscopy; Frequency; Instruments; Materials science and technology; Quality control; Scanning electron microscopy; Ultrasonic imaging;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1979.11281
  • Filename
    1455550