Title :
A New Electroless Method for Low-Loss Microwave Integrated Circuits
Author :
Mahapatra, S. ; Prasad, S.N.
Author_Institution :
Indian Inst. of Tech.
fDate :
12/1/1978 12:00:00 AM
Abstract :
A new method of depositing copper on alumina substrates is described. This results in less attenuation and better adhesion than that obtained by the prior method. The measured attenuation of microstriplines made by conventional vacuum evaporation of chromegold and by electroless copper deposition methods is compared in the range of 2-10 GHz. It is found that classical chrome-gold metallization gives higher attenuation. The experimental data for this new method are in good agreement with the theoretically predicted values. The superiority of the new method over the prior methods is discussed.
Keywords :
Integrated circuit fabrication; Microstrip circuits; Attenuation; Capacitors; Ceramics; Copper; Dielectrics; Laboratories; Microwave integrated circuits; Microwave theory and techniques; Substrates; Vacuum technology;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
DOI :
10.1109/TCHMT.1978.1135299