Title :
Thin-Film Hybrids - A Practical Approach to Integrated Circuitry
Author_Institution :
Burroughs Corp.
fDate :
6/1/1965 12:00:00 AM
Abstract :
Thin-film hybrid circuits are described, and it is shown how, and why they are especially applicable, both practically and economically, in applications where space, weight, power, and operating speed are important considerations.
Keywords :
Anodizing; Cathodic sputtering; Ceramic-wafer capacitor; Deposited circuits; Discrete components; Fabrication; Hybrid circuits; IC (Integrated circuits); Integrated circuits; Microelectronics; Miniaturization; Molecular circuits; Photoetching; Resistor/conductor networks; Substrates; Thin films; Thin-film hybrid; Capacitors; Conductive films; Costs; Electronics industry; Integrated circuit noise; Power generation economics; Resistors; Sputtering; Substrates; Thin film circuits;
Journal_Title :
Parts, Materials and Packaging, IEEE Transactions on
DOI :
10.1109/TPMP.1965.1135344