DocumentCode
956534
Title
Correction of spreading resistance data obtained from bevelled shallow junctions
Author
Abbasi, S.A. ; Brunnschweiler, A.
Author_Institution
University of Southampton, Department of Electronics, Southampton, UK
Volume
16
Issue
13
fYear
1980
Firstpage
507
Lastpage
508
Abstract
The spreading resistance profile obtained from a bevelled shallow diffused layer differs significantly from the profile obtained by successive layer removal. This difference may be at least partially explained by the poor lateral resolution of the spreading resistance method. A computer correction technique is described which has been found to completely remove the discrepancy observed at the surface.
Keywords
electric resistance; electronic engineering computing; p-n junctions; bevelled shallow junctions; computer correction technique; lateral resolution; spreading resistance profile;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19800354
Filename
4244124
Link To Document