• DocumentCode
    957959
  • Title

    Special Section on Advanced Process Control

  • Author

    Moyne, James R. ; Patel, Nital S.

  • Volume
    20
  • Issue
    4
  • fYear
    2007
  • Firstpage
    343
  • Lastpage
    344
  • Abstract
    The twenty-six papers in this special issue are devoted to advanced process control.
  • Keywords
    Area measurement; Conferences; Fault detection; Frequency measurement; Manufacturing processes; Process control; Research and development; Semiconductor device manufacture; Sensor systems; Special issues and sections;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2007.907606
  • Filename
    4369333
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=957959