DocumentCode
958084
Title
Performance Assessment of Run-to-Run EWMA Controllers
Author
Prabhu, Amogh V. ; Edgar, Thomas F.
Author_Institution
Univ. of Texas, Austin
Volume
20
Issue
4
fYear
2007
Firstpage
381
Lastpage
385
Abstract
An iterative method is developed to optimize a performance criterion for best achievable performance for discrete integral controllers used in run-to-run control. An analytical expression is derived so that a realistic assessment of the given integral controller is obtained. Using the theoretical equivalence of discrete integral and exponentially weighted moving average (EWMA) controllers, the method is then extended to performance assessment of EWMA controllers. A semiconductor manufacturing example is used to illustrate the utility of the method.
Keywords
controllers; feedback; iterative methods; moving average processes; process control; discrete integral controllers; exponentially weighted moving average controllers; iterative method; performance assessment; semiconductor manufacturing; Control systems; Degradation; Feedback control; Filtering; Iterative methods; MIMO; Optimal control; Optimization methods; Performance analysis; Semiconductor device manufacture; Feedback control delay; integral control; performance assessment; single loop;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2007.907611
Filename
4369347
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