Title :
Performance of sputtered SiO2 film as acoustic antireflection coating at sapphire/water interface
Author :
Kushibiki, J. ; Sannomiya, T. ; Chubachi, N.
Author_Institution :
Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
Abstract :
The effect of sputtered SiO2 films as an acoustic antireflection coating for matching the large acoustic discontinuity at the sapphire/water interface is experimentally and theoretically investigated in a frequency range of 200 to 1100 MHz. By the introduction of SiO2 films, the transmission loss of more than 9 dB at the interface is reduced to less than 1 dB at a quarter-wavelength frequency of SiO2 film with high reproducibility.
Keywords :
acoustic microscopes; acoustic wave reflection; antireflection coatings; sapphire; silicon compounds; sputtered coatings; water; acoustic antireflection coating; acoustic discontinuity; acoustic microscopes; sapphire H2O interface; sputtered SiO2 film; transmission loss;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19800524