DocumentCode :
958841
Title :
Planar processing for magnetic bubble devices
Author :
Rose, D.K.
Author_Institution :
Hewlett-Packard Co., Palo Alto, California
Volume :
12
Issue :
6
fYear :
1976
fDate :
11/1/1976 12:00:00 AM
Firstpage :
618
Lastpage :
621
Abstract :
A two-mask level, conductor first thin film process is described for fabrication of magnetic bubble devices. The process permits a stepless permalloy level over a conductor that may be two to three times as thick as conventional processing The planar process is attained by anodizing a thick aluminum alloy film in all regions where no conductor is needed. The process described solves problems in conventional processing caused by thin conductor metalization and permalloy step coverage. Replication, nucleation, and annihilation devices made with this process promise superior performance.
Keywords :
Magnetic bubble device fabrication; Aluminum alloys; Bonding; Conductive films; Conductors; Electromigration; Garnets; Insulation; Magnetic devices; Magnetic films; Voltage;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.1976.1059097
Filename :
1059097
Link To Document :
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