Title :
Planar processing for magnetic bubble devices
Author_Institution :
Hewlett-Packard Co., Palo Alto, California
fDate :
11/1/1976 12:00:00 AM
Abstract :
A two-mask level, conductor first thin film process is described for fabrication of magnetic bubble devices. The process permits a stepless permalloy level over a conductor that may be two to three times as thick as conventional processing The planar process is attained by anodizing a thick aluminum alloy film in all regions where no conductor is needed. The process described solves problems in conventional processing caused by thin conductor metalization and permalloy step coverage. Replication, nucleation, and annihilation devices made with this process promise superior performance.
Keywords :
Magnetic bubble device fabrication; Aluminum alloys; Bonding; Conductive films; Conductors; Electromigration; Garnets; Insulation; Magnetic devices; Magnetic films; Voltage;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1976.1059097