DocumentCode :
959258
Title :
Quantum interference devices fabricated using molecular-beam epitaxy and ultra-high-resolution electron-beam lithography
Author :
Chou, Stephen Y. ; Pease, R.F.W. ; Harris, J.S.
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., CA, USA
Volume :
36
Issue :
11
fYear :
1989
fDate :
11/1/1989 12:00:00 AM
Firstpage :
2617
Lastpage :
2618
Abstract :
Summary form only given. The authors have fabricated various new lateral quantum interference devices (QIDs) using molecular-beam epitaxy and ultra-high-resolution electron-beam lithography and have observed conductance oscillations in these devices. These QIDs have a structure which is similar to that of a conventional MODFET, except for the gate(s), which consists of various nanometer patterns instead of a plain gate. The gate nanometer patterns create electrostatic potential barriers and well(s) in the channel. At low temperatures, as the electron mean-free path approaches or becomes longer than the gate length, quantum interference of the electron wave with the barriers and wells results in the formation of quasi-bound states or subbands, and, as a result, the conductance oscillates as either the gate voltage or the source-drain voltage is scanned. Several novel QIDs are presented with emphasis on a new lateral quantum box transistor (LQBFET), which has a railway track gate.
Keywords :
electron beam lithography; high electron mobility transistors; molecular beam epitaxial growth; semiconductor growth; semiconductor quantum wells; MODFET; conductance oscillations; electron mean-free path; electron wave interference; electrostatic potential barriers; gate nanometer patterns; lateral quantum box transistor; lateral quantum interference devices; molecular-beam epitaxy; quasi-bound states; railway track gate; subbands; ultra-high-resolution electron-beam lithography; Electrons; Electrostatics; HEMTs; Interference; Lithography; MODFETs; Molecular beam epitaxial growth; Rail transportation; Temperature; Voltage;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/16.43733
Filename :
43733
Link To Document :
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