• DocumentCode
    959356
  • Title

    Automatic grid refinement and higher order flux discretization for diffusion modeling

  • Author

    Lin, Chih-Chuan ; Law, Mark E. ; Lowther, Rex E.

  • Author_Institution
    Dept. of Electr. Eng., Florida Univ., Gainesville, FL, USA
  • Volume
    12
  • Issue
    8
  • fYear
    1993
  • fDate
    8/1/1993 12:00:00 AM
  • Firstpage
    1209
  • Lastpage
    1216
  • Abstract
    The authors point out that modern numerical process simulators are becoming increasingly complicated in both physical models and domain shape. Grid generation is difficult for these simulators because of the inherently transient nature of the problems being solved. Here, adaptive grid refinement is considered for use in solving diffusion problems. Higher order approximations to the discretized diffusion flux are also studied. Several methods of both adaptive grid refinement and discretization are investigated and compared in terms of CPU time and final discretization error. All the methods are directly applied to the one-dimensional version of SUPREM-IV
  • Keywords
    diffusion in solids; digital simulation; electronic engineering computing; semiconductor process modelling; CPU time; SUPREM-IV; adaptive grid refinement; diffusion modeling; discretization error; higher order flux discretization; process simulation; Annealing; Boron; Computational efficiency; Computational modeling; Grid computing; Mesh generation; Numerical simulation; Piecewise linear approximation; Semiconductor process modeling; Shape;
  • fLanguage
    English
  • Journal_Title
    Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0278-0070
  • Type

    jour

  • DOI
    10.1109/43.238613
  • Filename
    238613