DocumentCode
959356
Title
Automatic grid refinement and higher order flux discretization for diffusion modeling
Author
Lin, Chih-Chuan ; Law, Mark E. ; Lowther, Rex E.
Author_Institution
Dept. of Electr. Eng., Florida Univ., Gainesville, FL, USA
Volume
12
Issue
8
fYear
1993
fDate
8/1/1993 12:00:00 AM
Firstpage
1209
Lastpage
1216
Abstract
The authors point out that modern numerical process simulators are becoming increasingly complicated in both physical models and domain shape. Grid generation is difficult for these simulators because of the inherently transient nature of the problems being solved. Here, adaptive grid refinement is considered for use in solving diffusion problems. Higher order approximations to the discretized diffusion flux are also studied. Several methods of both adaptive grid refinement and discretization are investigated and compared in terms of CPU time and final discretization error. All the methods are directly applied to the one-dimensional version of SUPREM-IV
Keywords
diffusion in solids; digital simulation; electronic engineering computing; semiconductor process modelling; CPU time; SUPREM-IV; adaptive grid refinement; diffusion modeling; discretization error; higher order flux discretization; process simulation; Annealing; Boron; Computational efficiency; Computational modeling; Grid computing; Mesh generation; Numerical simulation; Piecewise linear approximation; Semiconductor process modeling; Shape;
fLanguage
English
Journal_Title
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
Publisher
ieee
ISSN
0278-0070
Type
jour
DOI
10.1109/43.238613
Filename
238613
Link To Document