DocumentCode :
959454
Title :
A Rapid Cycle Method for Gross Leak Testing with the Helium Leak Detector
Author :
Ruthberg, Stanley
Author_Institution :
Electron Devices Division,National Bureau of Standards,DC
Volume :
3
Issue :
4
fYear :
1980
fDate :
12/1/1980 12:00:00 AM
Firstpage :
564
Lastpage :
570
Abstract :
A new noncontaminating dry gas, quantitative test method has been developed that permits gross leak measurements on hermetic packages. It provides rapid testing with a helium leak detector over the leak size range of less than 1 x 10-5to more than I atm-cm3/s with a test gas of ~1 percent helium. The present limitation on dry gas procedures results from the rapid depletion of the test gas from the package interior which prevents detection of the larger leaks. The rapid cycle method attacks this limitation by employing either a rapid transfer of the test package or a rapid gas cycling technique for extending the upper range of the helium leak detector procedure. Theoretical relationships have been derived based on viscous flow to correlate the leak detector reading to leak size. Experimental apparatus is described, and test results are given for a test time of about g s, a measurement precision of 15-35 percent, and a correlation coefficient between theory and test of better than 0.99. The rapid transfer mode of operation can be implemented readily with any helium leak detector equipped for fast pump-down and high helium flow rate.
Keywords :
Integrated circuit testing; Noble gases; Packaging; Detectors; Helium; Leak detection; NIST; Phase detection; Pollution measurement; Semiconductor device packaging; Size measurement; Testing; Time measurement;
fLanguage :
English
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher :
ieee
ISSN :
0148-6411
Type :
jour
DOI :
10.1109/TCHMT.1980.1135652
Filename :
1135652
Link To Document :
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