An experimental technique and a model for studying the operation of harmonic side-drive micrometers

Author

Dhuler, Vijayakumar R. ; Mehregany, Mehran ; Phillips, Stephen M.

Author_Institution

Dept. of Electr. Eng. & Appl. Phys., Case Western Reserve Univ., Cleveland, OH, USA

Volume

40

Issue

11

fYear

1993

fDate

11/1/1993 12:00:00 AM

Firstpage

1977

Lastpage

1984

Abstract

The operation of harmonic side-drive micrometers is studied through gear ratio measurements and modeling of the micrometer dynamics. A simple experiment in which the wobble micromotor gear ratio is measured as a function of excitation voltage and pattern is used to characterize micromotor operation. This experiment in conjunction with the micromotor dynamic model presented can be used to study friction at the micromotor bearing and bushing contacts by fitting the model to the experiment. The model accounts for sliding and rolling of the rotor on the bearing, and sliding of the rotor on the bushing. The model can be used in conjunction with the experiment to estimate the bearing coefficient of friction and the bushing friction force. For micromotor operation in nitrogen gas, a polysilicon on polysilicon coefficient of friction of 0.36-0.4 is estimated. The bushing frictional force is found to consist of a constant term and a term that depends on the square of the excitation voltage

Keywords

bushings; friction; machine bearings; micromechanical devices; rotors; small electric machines; Si; bushing contacts; excitation voltage; friction; gear ratio; harmonic side-drive micrometers; micrometer dynamics; micromotor bearing; model; polysilicon; rolling; rotor; sliding; wobble micromotor; Contacts; Electrostatic analysis; Frequency; Friction; Gears; Insulators; Micromotors; Nitrogen; Rotors; Voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.239737

Filename

239737