Title :
Large-stroke MEMS deformable mirrors for adaptive optics
Author :
Dagel, Daryl J. ; Cowan, William D. ; Spahn, Olga Blum ; Grossetete, Grant D. ; Griñe, Alejandro J. ; Shaw, Michael J. ; Resnick, Paul J. ; Jokiel, Bernhard, Jr.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
6/1/2006 12:00:00 AM
Abstract :
Surface-micromachined deformable mirrors that exhibit greater than 10 μm of stroke are presented. The segmented arrays described here consist of 61 and 85 hexagonal, piston/tip/tilt mirrors (three actuators each) with diameters of 500 and 430 μm, respectively, and fill a 4 mm circular aperture. Devices were packaged in 208 and 256 pin-grid arrays and driven by a compact control board designed for turn-key operation. After metallization and packaging mirror bow is ∼680 nm (λ/1), but a heat-treatment procedure is proposed for controlling mirror curvature to better than λ/10. An optical test bed was used to demonstrate basic beam splitting and open-loop aberration correction, the results of which are also presented.
Keywords :
adaptive optics; heat treatment; metallisation; microactuators; micromachining; micromirrors; optical beam splitters; 4 mm; 430 micron; 500 micron; adaptive optics; beam splitting; circular aperture; compact control board; heat treatment; large-stroke MEMS deformable mirrors; metallization; open loop aberration correction; optical test bed; pin grid arrays; segmented arrays; surface micromachined deformable mirrors; Actuators; Adaptive optics; Apertures; Metallization; Micromechanical devices; Mirrors; Open loop systems; Packaging; Pistons; Temperature control; Adaptive optics; deformable mirrors; microelectromechanical systems (MEMS); micromirrors;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2006.876794
