Title :
Materials and processes for preform fabrication—Modified chemical vapor deposition and plasma chemical vapor deposition
Author :
MacChesney, John B.
Author_Institution :
Bell Laboratories, Murray Hill, NJ
Abstract :
This paper summarizes recent achievements and current directions of process developments for making optical fibers by modified chemical vapor deposition and plasma deposition.
Keywords :
Chemical vapor deposition; Glass; Optical device fabrication; Optical fiber communication; Optical fibers; Plasma chemistry; Plasma materials processing; Plasma sources; Preforms; Silicon compounds;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1980.11826
