Title :
Fabrication of a 16-Channel Integrated Optical Data Preprocessor
Author :
Hartman, Nile F. ; Verber, Carl M. ; Chapman, Charles M.
Author_Institution :
Battelle Columbus Lab, OH
fDate :
12/1/1981 12:00:00 AM
Abstract :
A 16-channel integrated optical data preprocessor based on a Mach-Zhender interferometer configuration has been fabricated on a LiNbO3 substrate. The fabrication procedure is reviewed and a detailed discussion of the steps utilized to integrate the individual components is presented. The results of the device testing experiments are also discussed.
Keywords :
Integrated circuit fabrication; Optical waveguides; Electrodes; Integrated optics; Lithography; Optical device fabrication; Optical interferometry; Optical sensors; Optical waveguides; Substrates; Titanium; Voltage;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
DOI :
10.1109/TCHMT.1981.1135837
