Title :
Special Section on the International Symposium on Semiconductor Manufacturing 2007 (ISSM 2007)
Abstract :
The five papers in this special section are based on work originally presented at the International Symposium on Semiconductor Manufacturing 2007 (ISSM 2007).
Keywords :
Lead compounds; Manufacturing industries; Manufacturing processes; Monitoring; Pulp manufacturing; Semiconductor device manufacture; Semiconductor device modeling; Special issues and sections; Technological innovation; Virtual manufacturing;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2008.2006087
