DocumentCode
962760
Title
Special Section on the IEEE International Conference on Microelectronic Test Structures
Author
Mita, Yoshio
Volume
21
Issue
4
fYear
2008
Firstpage
493
Lastpage
494
Abstract
The seven papers in this special section are based on the work presented at the ICMTS 2007.
Keywords
Circuit testing; Electrical resistance measurement; Electronic equipment testing; Fabrication; MOSFETs; Microelectronics; Random access memory; Semiconductor device testing; Special issues and sections; System testing;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2008.2008008
Filename
4657441
Link To Document