Interdigital sensors and transducers

Author

Mamishev, Alexander V. ; Sundara-Rajan, Kishore ; Yang, Fumin ; Du, Yanqing ; Zahn, Markus

Author_Institution

Dept. of Electr. Eng., Univ. of Washington, Seattle, WA, USA

Volume

92

Issue

5

fYear

2004

fDate

5/1/2004 12:00:00 AM

Firstpage

808

Lastpage

845

Abstract

This review paper focuses on interdigital electrodes-a geometric structure encountered in a wide variety of sensor and transducer designs. Physical and chemical principles behind the operation of these devices vary so much across different fields of science and technology that the common features present in all devices are often overlooked. This paper attempts to bring under one umbrella capacitive, inductive, dielectric, piezoacoustic, chemical, biological, and microelectromechanical interdigital sensors and transducers. The paper also provides historical perspective, discusses fabrication techniques, modeling of sensor parameters, application examples, and directions of future research.

Keywords

capacitive sensors; electrodes; interdigital transducers; microsensors; nondestructive testing; reviews; surface acoustic wave sensors; surface acoustic wave transducers; biological sensors; capacitive sensors; chemical sensors; dielectric sensors; dielectrometry imagers; fabrication techniques; inductive sensors; interdigital electrodes; interdigital sensors; interdigital transducers; microelectromechanical sensors; modeling; nondestructive testing; piezoacoustic sensors; sensor parameters; surface acoustic waves; Acoustic sensors; Biosensors; Capacitive sensors; Chemical and biological sensors; Chemical technology; Dielectrics; Electrodes; Micromechanical devices; Parameter estimation; Transducers;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/JPROC.2004.826603

Filename

1288505