Title :
Statistical control of VLSI fabrication processes. II. A software system
Author :
Shyamsundar, C.R. ; Mozumder, Purnendu K. ; Strojwas, Andrzej J.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie-Mellon Univ., Pittsburgh, PA, USA
fDate :
5/1/1988 12:00:00 AM
Abstract :
For pt.I see ibid., vol.1, no.2, p.62-71, 1988. The algorithms used to implement the CMU-CAM statistical control system for VLSI integrated circuit fabrication are presented. The CMU-CAM system performs three major operations: modeling; quality control; and feed-forward control. In order to increase the efficiency of modeling and control, the problem is decomposed using statistical factorization techniques. Algorithms for process modeling and algorithms used in quality control and feed-forward control are described. The CMU-CAM system performs profit maximization through statistical process control. Its capabilities are illustrated by a number of computational examples
Keywords :
VLSI; electronic engineering computing; integrated circuit manufacture; manufacturing data processing; process computer control; quality control; CMU-CAM system; IC production; VLSI fabrication processes; computer aided manufacture; feed-forward control; modeling; process control; profit maximization; quality control; software system; statistical control system; statistical factorization techniques; Clustering algorithms; Control systems; Fabrication; Feeds; Process control; Quality control; Software algorithms; Software performance; Software systems; Very large scale integration;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
