Tracking control of electrostatically actuated micromirror with closed-loop feedback circuit

Author

Park, Jae Hyo ; Chung, Taeyoung ; Jeon, J.A. ; Kim, Ji ; Kim, Marn-Go ; Kim, Young Keun ; Na, G. ; Park, Il H. ; Yoo, B.W.

Author_Institution

Dept. of Phys. & Res. Center of MEMS Space Telescope, Ewha Womans Univ., Seoul

Volume

44

Issue

22

fYear

2008

Firstpage

1295

Lastpage

1296

Abstract

Presented is a closed-loop feedback control of an electrostatically actuated micromirror to track a moving light source and to stabilise fast the tilting angle. The micromirror has been designed and fabricated with single crystalline silicon. Tracking and tilt-angle stabilisation has been tested using a position-sensing detector and analogue feedback control circuit. Successful tracking of a moving light source was achieved. The feedback control has been also verified to improve the tilt-angle stabilisation time of the micromirror significantly.

Keywords

closed loop systems; electrostatic actuators; elemental semiconductors; integrated optics; micromirrors; optical feedback; optical tracking; silicon; Si; analogue feedback control circuit; closed-loop feedback control; electrostatic actuator; light source tracking; micromirror; position-sensing detector; single crystalline silicon; tilt-angle stabilisation; tracking control;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:20082051

Filename

4658749