DocumentCode
964547
Title
Sub-terahertz testing of silicon MOSFET
Author
Stillman, W. ; Veksler, Dekel ; Elkhatib, T.A. ; Salama, Khaled ; Guarin, Fernando ; Shur, Michael S.
Author_Institution
Dept. of ECSE, Rensselaer Polytech. Inst., Troy, NY
Volume
44
Issue
22
fYear
2008
Firstpage
1325
Lastpage
1326
Abstract
The difference in the terahertz response of Si MOSFETs with identical above threshold characteristics but different values of the leakage current in the below threshold regime is demonstrated. The results show that the terahertz response test can be used as a complementary testing technique of a Si MOS VLSI under bias.
Keywords
MOSFET; elemental semiconductors; leakage currents; silicon; submillimetre waves; Si; leakage current; silicon MOSFET; subterahertz testing;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20089418
Filename
4658768
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