DocumentCode :
964719
Title :
La:YIG disks on GGG substrates for microwave applications
Author :
Nemiroff, Michael ; Yue, Henry
Author_Institution :
Burroughs Corporation, San Diego, CA.
Volume :
13
Issue :
5
fYear :
1977
fDate :
9/1/1977 12:00:00 AM
Firstpage :
1238
Lastpage :
1240
Abstract :
A method is described for growing thick ( > 10\\mu m) La3+: YIG films on GGG substrates. An array of disks is formed by etching unwanted regions of the La3+:YIG film. FMR measurements on 5μm thick, 1 mm disks yield linewidths <0.5 oe.
Keywords :
Chemicals; Garnet films; Hafnium; Lattices; Magnetic films; Optical films; Reflection; Resists; Sputter etching; Substrates;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.1977.1059674
Filename :
1059674
Link To Document :
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