DocumentCode
964920
Title
Improved Glass-to-Metal Sealing Through Furnace Atmosphere Composition Control
Author
Yext, Walter F. ; Shook, Bruce J. ; Katzenberger, Wayne S. ; Michalek, Robert C.
Author_Institution
Air Product and Chemicals, Inc., Allentown, PA, USA
Volume
6
Issue
4
fYear
1983
fDate
12/1/1983 12:00:00 AM
Firstpage
455
Lastpage
459
Abstract
The ability is demonstrated to produce consistently an intergranular oxide layer between 2 µm and 10 µm depth on Kovar alloy using a humidified hydrogen nitrogen furnace atmosphere. Oxidizing the Kovar to a 2-10-µm intergranular depth promotes strong chemical/mechanical bonding between the metal and the borosilicate glass typically used in the production of matched glass-to-metal seals. Furnace dew point, hydrogen concentration, residence time, and decarburization pretreatment were studied to determine their effect on oxide formation. A reproducibility study was performed to demonstrate the high consistency and repeatability of the system in an actual production environment. Bubble formation in the glass after sealing is discussed and is shown to be a result of overoxidation. All three steps of matched sealing (decarburiziug, oxidizing, and sealing) are studied with emphasis on control of the oxidizing step.
Keywords
Glass materials/devices; Hybrid integrated circuit packaging; Seals; Atmosphere; Bonding; Chemical products; Furnaces; Glass; Hydrogen; Nitrogen; Production; Reproducibility of results; Seals;
fLanguage
English
Journal_Title
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher
ieee
ISSN
0148-6411
Type
jour
DOI
10.1109/TCHMT.1983.1136201
Filename
1136201
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