Title :
Keynote address to the first international vacuum microelectronics conference, June 1988: pathways to vacuum microelectronics
Author_Institution :
SRI Int., Menlo Park, CA, USA
fDate :
11/1/1989 12:00:00 AM
Abstract :
The author examines how vacuum microelectronics evolved to its present status. He discusses four main pathways to vacuum microelectronics: thermionic vacuum tubes, solid-state devices, microscopy, and the science of living cells (i.e. molecular engineering).
Keywords :
history; thermionic tubes; vacuum tubes; microscopy; molecular engineering; solid-state devices; thermionic vacuum tubes; vacuum microelectronics;
Journal_Title :
Electron Devices, IEEE Transactions on
