• DocumentCode
    965884
  • Title

    Approximations to two-step diffusion process by Prony´s method

  • Author

    Selvakumar, C.R.

  • Author_Institution
    Indian Institute of Technology, Madras, India
  • Volume
    70
  • Issue
    5
  • fYear
    1982
  • fDate
    5/1/1982 12:00:00 AM
  • Firstpage
    514
  • Lastpage
    516
  • Abstract
    A simple two-term approximation that is accurate over a wide range of drive-in ratios is given for the two-step diffusion process. Comparison with earlier approximations are graphically given. The final approximation is simple and convenient in evaluating the device performance. The Prony´s method adopted to approximate erfc(x) is useful in approximating other profiles as well, such as anomalous diffusion profile of phosphorus, ion-implanted profile, etc.
  • Keywords
    Diffusion processes; Equations; Equivalent circuits; Frequency; Impedance measurement; Insertion loss; Loss measurement; Notice of Violation; Power measurement; Voltmeters;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1982.12336
  • Filename
    1456604