Title :
Permalloy films on silicon
Author :
Lee, R.N. ; Anderson, Wallace E. ; Liu, Yuan-Jye ; Schwee, Leonard J.
Author_Institution :
Naval Surface Weapons Center, Silver Spring, MD
fDate :
9/1/1978 12:00:00 AM
Abstract :
Permalloy cross-tie memory registers were fabricated on silicon substrates. The performance was comparable with that of similar devices on glass substrates.
Keywords :
Magnetic film memories; Permalloy memories; Silicon materials/devices; Cleaning; Glass; Magnetic films; Methanol; Registers; Semiconductor devices; Semiconductor films; Silicon; Substrates; Temperature distribution;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1978.1059796
