Patterned Multipixel Membrane Mirror MEMS Optically Addressed Spatial Light Modulator With Megahertz Response

Author

Griffith, Gregory ; Haji-Saeed, Bahareh ; Sengupta, Sandip K. ; Goodhue, William D. ; Khoury, Jed ; Woods, Charles L. ; Kierstead, John

Author_Institution

Phys. Dept., Univ. of Massachusetts, Lowell, MA

Volume

19

Issue

3

fYear

2007

Firstpage

173

Lastpage

175

Abstract

In this letter, we report the fabrication, modeling and characterization of an all-optically addressed spring patterned silicon-nitride deformable mirror microelectromechanical-systems device. Combinations of high-frequency ac and dc bias voltages are applied across the device. The experimental verified theoretical modeling for this device shows the mirror deflection saturation as a function of light intensity appropriate for the dynamic range compression deconvolution. Frequency response up to 10MHz, practical for correcting very fast turbulences, was measured

Keywords

adaptive optics; deconvolution; micro-optomechanical devices; micromirrors; optical fabrication; silicon compounds; spatial light modulators; MEMS; compression deconvolution; membrane mirror; microelectromechanical systems; mirror deflection saturation; silicon-nitride deformable mirror; spatial light modulator; Biomembranes; Deformable models; Dynamic range; Micromechanical devices; Mirrors; Optical device fabrication; Optical modulation; Optical saturation; Springs; Voltage; Adaptive optics; microstructure devices; optoelectronics;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2006.890029

Filename

4063375