Super-miniaturization of low-power vacuum microwave devices

The main advantages of low-power vacuum microwave devices, e.g. insensitivity to temperature, radiation, and electromagnetic fields of high amplitude, are maintained at any level of miniaturization. Furthermore, superminiaturization of vacuum devices brings about new features that substantially surpass the capabilities of both nonminiaturized vacuum devices and miniaturized solid-state semiconductor devices, such as unusual accuracy, stability, and low noise. These new features can be realized both in devices with lumped constants and in devices that have a distributed interaction with the microwave field.