Title :
Dynamic Operational Stress Measurement of MEMS Using Time-Resolved Raman Spectroscopy
Author :
Pomeroy, James W. ; Gkotsis, Petros ; Zhu, Meiling ; Leighton, G. ; Kirby, Paul ; Kuball, Martin
Author_Institution :
Bristol Univ., Bristol
Abstract :
A dynamic-stress analysis method, based on time-resolved micro Raman spectroscopy, has been developed for reliability studies of microelectromechanical systems. This novel technique is illustrated by measuring temporally and spatially resolved stress maps of a piezoelectrically actuated silicon microcantilever when driven at its first- (6.094 kHz) and second-order (37.89 kHz) resonant frequencies. Stress amplitudes of up to 180 plusmn 10 MPa were measured at the maximum stress locations. The time-resolved Raman stress measurements are compared to the results of finite-element analysis and laser Doppler vibrometry.[2008-0003].
Keywords :
Raman spectroscopy; cantilevers; finite element analysis; micromechanical devices; piezoelectric devices; stress analysis; Dynamic operational stress measurement; MEMS; dynamic-stress analysis method; finite-element analysis; frequency 37.89 kHz; frequency 6.094 kHz; laser Doppler vibrometry; microelectromechanical system; piezoelectrically actuated silicon microcantilever; resonant frequencies; time-resolved Raman spectroscopy; Microelectromechanical devices; reliability; simulation; spectroscopy; strain;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2008.2004849
