Title :
Micromachined circuits for millimeter- and sub-millimeter-wave applications
Author :
Katehi, Linda P B ; Rebeiz, Gabriel M. ; Weller, Thomas M. ; Drayton, Rhonda F. ; Cheng, Heng-Ju ; Whitaker, John F.
Author_Institution :
Michigan Univ., Ann Arbor, MI, USA
Abstract :
Two approaches for the development of micromachined circuits for millimeter- and submillimeter-wave applications are discussed. These technologies provide a means to overcome the drawbacks typically associated with conventional planar transmission lines, such as microstrip and coplanar waveguides. Examples demonstrating the use of micromachining to effectively incorporate a third dimension into the geometry of monolithic circuits are presented. This introduces additional parameters in the design and results in structures with superior electrical performance, such as membrane-supported circuits, and reduced volume and weight, such as micromachined-shielded circuits. Micromachined circuits which incorporate miniaturized shielding packages in a monolithic design are described. The performance of these circuits shows that the low-volume, low-weight packaging is effective in reducing signal loss, without degrading the desired frequency response.<>
Keywords :
MMIC; integrated circuit technology; low-pass filters; microstrip lines; microwave antennas; microwave filters; network synthesis; packaging; shielding; submillimetre wave devices; surface treatment; transmission lines; MM-wave application; Si; design; electrical performance; frequency response; membrane-supported circuits; micromachined circuits; micromachined-shielded circuits; monolithic circuits; packaging; signal loss; subMM-wave application; Coplanar waveguides; Micromachining; Microstrip; Millimeter wave technology; Packaging; Planar transmission lines; Planar waveguides; Submillimeter wave circuits; Submillimeter wave propagation; Submillimeter wave technology;
Journal_Title :
Antennas and Propagation Magazine, IEEE
