• DocumentCode
    966941
  • Title

    Electron Beam Cutting Techniques for Electronic Applications

  • Author

    Schollhammer, F.R.

  • Author_Institution
    United Aircraft Corporation
  • Volume
    7
  • Issue
    2
  • fYear
    1963
  • fDate
    4/1/1963 12:00:00 AM
  • Firstpage
    16
  • Lastpage
    27
  • Abstract
    The advantages of electron beam cutting are outlined. Specific production applications of these cutting techniques to electronic packaging are discussed in detail. Examples presented include: the etching of micro components; the scribing of thin films; the drilling and cutting of precision holes and slots in ceramic components; and the use of the electron beam cutter as a salvage tool.
  • Keywords
    Acceleration; Aerospace electronics; Cathodes; Drilling; Electron beams; Electron optics; Electronics packaging; Kinetic energy; Plasma temperature; Welding;
  • fLanguage
    English
  • Journal_Title
    Product Engineering and Production, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0097-4544
  • Type

    jour

  • DOI
    10.1109/TPEP.1963.1136395
  • Filename
    1136395
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=966941