DocumentCode
966995
Title
Production Techniques for Integrated Electronics
Author
Fuller, W.D.
Author_Institution
Lockheed Missiles and Space Company
Volume
7
Issue
3
fYear
1963
fDate
7/1/1963 12:00:00 AM
Firstpage
20
Lastpage
32
Abstract
Integrated components made by using thin film and semiconductor techniques have an important part in the design and fabrication of physically smaller, more reliable electronic systems. The general processes of materials preparation, metallizing, circuit pattern formation, materials modification, pattern modification, lead attachment and protection are presented for both thin film and semiconductor integrated components. Comparative evaluation indicates that a combination of the two technologies will be used to meet the requirements of the sixties.
Keywords
Fabrication; Inorganic materials; Integrated circuit metallization; Integrated circuit reliability; Materials preparation; Pattern formation; Production; Semiconductor device reliability; Semiconductor thin films; Thin film circuits;
fLanguage
English
Journal_Title
Product Engineering and Production, IEEE Transactions on
Publisher
ieee
ISSN
0097-4544
Type
jour
DOI
10.1109/TPEP.1963.1136400
Filename
1136400
Link To Document