DocumentCode :
967725
Title :
Interfacial layer formation in the vacuum-deposited aluminum/YZ lithium niobate
Author :
Singh, Awatar
Author_Institution :
CEERI, Pilani, India
Volume :
70
Issue :
12
fYear :
1982
Firstpage :
1458
Lastpage :
1458
Abstract :
The vacuum-deposited Al/YZ LiNbO3interface has been studied by fabricating a surface acoustic wave (SAW) color-TV IF filter for the European PAL standard with 38.9-MHz vision carrier. An interfacial layer is formed whenever Al is deposited on the LiNbO3surface. This interfacial layer, which is attributed to the reaction product of aluminum with lithium niobate, causes the positive shift in the frequency response.
Keywords :
Aluminum; Dielectric thin films; Etching; Fabrication; Filters; Frequency response; Lithium niobate; Rough surfaces; Surface acoustic wave devices; Surface acoustic waves;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1982.12510
Filename :
1456778
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=967725
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