Title :
O.M. v.p.e. growth of AlGaSb and AlGaAsSb
Author :
Cooper, C.B. ; Saxena, R.R. ; Ludowise, M.J.
Author_Institution :
Varian Associates Inc., Corporate Solid State Laboratory, Palo Alto, USA
Abstract :
The epitaxial growth of AlGaSb and AlGaAsSb alloys by o.m. v.p.e. is reported. The growth technique and the dependence of the alloy composition on the input flux of gases are discussed.
Keywords :
III-V semiconductors; aluminium compounds; semiconductor growth; vapour phase epitaxial growth; AlGaAsSb; AlGaSb; VPE; growth technique; organometallic vapour phase epitaxy;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19800636
